Application of 9 × 9 grid gas bags pressure control technology to imprinting of various microstructures

This study proposed a pressure control technology of 9 × 9 grid gas bags for application to imprinting of various microstructures. First, the 9 × 9 grid imprinting system was designed and constructed. The novel system used laser light-emitting elements for correction through geometric method before the experiment. Moreover, the proposed system can set the imprint inclined plane in small inclination angle and accurate control pressure of 9 × 9 grid areas to achieve novel imprinting process of microstructures. The experimental results showed that 9 × 9 grid gas bag pressure control technology can accurately correct the plane of the imprinting system before experiment, accurately set the inclined plane required for the experiment, and accurately imprint microstructures.