کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
10428755 | 909421 | 2005 | 6 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
An approach to achieve lateral superresolution for small probe confocal measurement system and its element
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
سایر رشته های مهندسی
مهندسی (عمومی)
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چکیده انگلیسی
A shaped annular beam superresolution approach is proposed to improve a lateral resolution of a small probe laser confocal measurement system (LCMS). The approach proposed enables lateral superresolution measurement of LCMS to be achieved by using a binary optical diffractive element to shape a He-Ne Gaussian laser beam into an annular beam with an inner diameter of 0.87 mm and an outer diameter of 1.8 mm required for superresolution measurement, and shift the beam spatial frequency from low to high. And a binary optical element (BOE) with 16 phase levels is designed and fabricated to shape a Gaussian laser beam into an annular beam. Preliminary experimental results indicate that an intensity distribution of a shaped annular beam is in agreement with simulation results, the diffractive efficiency is 87.2%; LCMS lateral and axial resolutions of 0.2 μm and 3 nm are achieved, respectively, and its measurement range is expanded nearly to double, when BOE is used in LCMS and λ=0.6328μm, NA=0.85.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Optik - International Journal for Light and Electron Optics - Volume 116, Issue 12, 24 November 2005, Pages 557-562
Journal: Optik - International Journal for Light and Electron Optics - Volume 116, Issue 12, 24 November 2005, Pages 557-562
نویسندگان
Weiqian Zhao, Qi Li, Lirong Qiu, Jiubin Tan, Qi Wang,