کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
10428977 | 909454 | 2005 | 11 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Aberration correction and its automatic control in scanning electron microscopes
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
سایر رشته های مهندسی
مهندسی (عمومی)
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Aberration correction and its automatic control in scanning electron microscopes Aberration correction and its automatic control in scanning electron microscopes](/preview/png/10428977.png)
چکیده انگلیسی
An automatic aberration correction method has been implemented in scanning electron microscopes (SEM). Necessity of the automatic aberration correction is discussed. The procedure of the automatic aberration correction is explained in detail, where deconvolution techniques are used in order to extract probe information from SEM images. Due to the precise digitization and the usage of proper combinations of correction fields, linearity has been found between the amplitude of each aberration and the corresponding field strength. Experimental results are shown which demonstrate that the aberrations are corrected automatically by a linear feedback control method. After the automatic aberration correction, the image quality has been improved drastically.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Optik - International Journal for Light and Electron Optics - Volume 116, Issue 9, 2 September 2005, Pages 438-448
Journal: Optik - International Journal for Light and Electron Optics - Volume 116, Issue 9, 2 September 2005, Pages 438-448
نویسندگان
Shinobu Uno, Kazuhiro Honda, Natsuko Nakamura, Miyuki Matsuya, Joachim Zach,