A comparison of structures and properties of SiNx and SiOx films prepared by PECVD

► We prepared SiOx and SiNx films by PECVD and investigated their structures and properties. ► Compared with SiOx, SiNx films exhibit better optical and mechanical properties. ► SiNx films are more suitable to be used in VOx-based infrared microbolometers. ► Micro-Raman spectroscopy exhibits advantage in characterizing amorphous thin films.