Silica Λ-shape wedge arrays fabrication and interspace tuning via hot embossing and sol-gel replication

► New type silica Λ-shape wedge arrays (SWAs) were fabricated by hot embossing and sol-gel based molding processes. ► The taper height and interspace tune had been realized. ► By changing the primal template, this method can be used to fabricate other patterned silica substrates.