کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
10633681 | 993050 | 2005 | 7 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Ga-doping for β-FeSi2 films prepared by molecular beam epitaxy
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
سرامیک و کامپوزیت
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
β-FeSi2 is expected as a new material for light emitting diode and optical sensor operating at 1.5 μm. However, doping techniques suited for various fabrication methods of β-FeSi2 films have not been established. In this report, we present the results of Ga doping as a p-type impurity into β-FeSi2 films using three molecular beam epitaxy (MBE)-associated growth methods. They are, (i) standard MBE method by depositing simultaneously Fe, Si and Ga molecular beams, (ii) alternating Fe/Si multilayers deposition method with an interval time between the Fe and Si depositions (migration enhanced epitaxy, MEE) in which Ga was deposited only in Si layer, (iii) standard alternating Fe/Si multilayers deposition (superlattice, SL) method in which Ga was deposited only in Si layer. All β-FeSi2 films were prepared on Si substrates at room and elevated temperatures in MBE chamber and were subjected to post-annealing. Ga concentration was adjusted by changing its Knudsen effusion cell temperature or opening time of shutter for K-cell. Unintentionally doped β-FeSi2 films prepared by SL method were n-type, having residual net electron concentration, â£ND-NA⣠of â¼3 Ã 1016 cmâ3 and mobility of â¼400 cm2/V s. When these β-FeSi2 films were doped with Ga above a critical concentration, they exhibited p-type conductivity. By varying Ga concentration, net hole concentration, â£NA-ND⣠ranging from 7 Ã 1016 to 2 Ã 1018 cmâ3 with hole Hall mobility, μh from 200 to 10 cm2/V s were obtained. These results demonstrate that Ga is an effective p-type dopant for β-FeSi2 films to fabricate various electronic and optoelectronic devices.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Optical Materials - Volume 27, Issue 5, February 2005, Pages 935-941
Journal: Optical Materials - Volume 27, Issue 5, February 2005, Pages 935-941
نویسندگان
Yasuhiro Fukuzawa, Ryo Kuroda, Zhengxin Liu, Masato Osamura, Teruhisa Ootsuka, Naotaka Otogawa, Yasuhiko Nakayama, Hisao Tanoue, Yunosuke Makita,