کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
10633682 | 993050 | 2005 | 6 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Doping of β-FeSi2 films with boron and arsenic by sputtering and its application for optoelectronic devices
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
سرامیک و کامپوزیت
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
We fabricated impurity-doped β-FeSi2 thin films with boron as p-type and arsenic as n-type dopants by sputtering method. The doping source materials were elemental boron chips and heavily arsenic-doped Si chips. They were put on two separate silicon targets and were co-sputtered with silicon during Fe/Si multilayer deposition. For boron-doped p-type β-FeSi2 films, microstructures were affected by the temperature decrease rate after annealing at 800 °C, and cracks were observed when the temperature decrease rate was high as 20 °C/min. It was found that cracks were eliminated by slow cooling at the rate of 2 °C/min. By changing boron concentration, net hole concentration from 3.0 Ã 1017 to 1.0 Ã 1019 cmâ3 and Hall mobilities from 100 to 20 cm2/Vs were successfully achieved. SIMS measurements showed homogeneous distribution of boron dopant in β-FeSi2 film. For arsenic-doped n-type β-FeSi2 films, the activation of arsenic dopant requested longer annealing time at 800 °C than for boron. The microstructures were independent on the cooling rate after annealing. The doping level of net electron concentration from 2.0 Ã 1017 to 4.0 Ã 1017 cmâ3 and mobility from 250 to 160 cm2/Vs were obtained when the arsenic concentration was changed from about 1.2 Ã 1018 to 3.2 Ã 1018 cmâ3. β-FeSi2 thin film p/n homojunctions were formed by successive deposition of p- and n-type β-FeSi2 films on Si substrates in the same sputtering chamber. The diodes showed rectifying I-V characteristics and photoresponse to 1.3-1.6 μm near-infrared light.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Optical Materials - Volume 27, Issue 5, February 2005, Pages 942-947
Journal: Optical Materials - Volume 27, Issue 5, February 2005, Pages 942-947
نویسندگان
Zhengxin Liu, Masato Osamura, Teruhisa Ootsuka, Shinan Wang, Yasuhiro Fukuzawa, Yasuhito Suzuki, Ryo Kuroda, Takahiro Mise, Naotaka Otogawa, Yasuhiko Nakayama, Hisao Tanoue, Yunosuke Makita,