Gorsky damping in nanomechanical structures

The critical frequency of Gorsky damping coincides with the structural resonant frequencies of nanomechanical structures over a wide range of solute diffusivities. A lower bound of 1 at.% hydrogen in silicon is estimated for Gorsky damping to attain values comparable to previously measured loss coefficients of single-crystal silicon nanomechanical cantilever-beam resonators.