Effect of Nd3+ incorporation on the microstructure and chemical structure of RF sputtered ZnO thin films

► Effects of Nd incorporation on ZnO thin films chemical and structural properties. ► Very low Nd concentrations were quantified by combining XRF and AES data. ► At low Nd concentration, Nd ions were successfully incorporated in the ZnO lattice. ► Structural changes turns up with increasing Nd doping level. ► At high Nd concentration, precipitation of a Nd2O3 separate phase occurs.