Study on range distribution parameters for fluorine ion implantation in KTiOAsO4 crystals at low velocity

Range distributions for fluorine ions in 19F+-implanted KTiOAsO4 (KTA) in an energy range of 80-350 keV were measured by using the 19F(p, αγ)16O resonant nuclear reaction at ER = 872.1 keV, with width Γ = 4.2 keV. A proper convolution calculation method was used to extract the true distributions of fluorine from the experimental excitation yield curves. The experimental range distribution parameters, Rp and ΔRp, were compared with those obtained from Monte Carlo simulation codes.