Simulation study on the influence of distribution of temperature, gas flow rate and gas component on SiC nanowires grew in self-designed CVD reaction chamber

Simulation study on the influence of distribution of temperature, gas flow rate and gas component on SiC nanowires grew in self-designed CVD reaction chamber

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Computational Materials Science - Volume 96, Part A, January 2015, Pages 63-68

Zhenjiang Li, Xiaolong Liu, Meng Zhang, Meixin Zhai,