کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
10653214 1002850 2005 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Amorphization of Si (100) under O+ implantation studied by spectroscopic ellipsometry
کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد دانش مواد (عمومی)
پیش نمایش صفحه اول مقاله
Amorphization of Si (100) under O+ implantation studied by spectroscopic ellipsometry
چکیده انگلیسی
The amorphization of crystalline Si (100) under 125 keV O+ ion implantation is investigated in the fluence range 1×1014 ions/cm2 to 1×1016 ions/cm2. The microstructure of the O+ implanted Si is modeled from ellipsometric data using a two phase, multilayer model within Bruggeman effective medium approximation (BEMA). The transition from the crystalline to the amorphous phase is found to be smooth and progressive. From a detailed analysis of the moments of the dielectric spectra and laser Raman spectroscopy, we infer that the amorphization occurs through a progressive disruption of long-range order caused by the overlap of amorphous nanozones. The dielectric spectrum of the fully amorphous phase is characterized using the Forouhi-Bloomer interband model.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Solid State Communications - Volume 133, Issue 12, March 2005, Pages 801-806
نویسندگان
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