کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
10673054 | 1010196 | 2010 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Submicron imprint of trench structures by external and intrinsic electromagnetic force
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موضوعات مرتبط
مهندسی و علوم پایه
سایر رشته های مهندسی
مهندسی صنعتی و تولید
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
This paper describes a novel method for replication of submicron trench features by intrinsic electromagnetic imprinting force derived from the material made by mixing nanosize ferrite powders into ultraviolet-curable polymer, leading to the advantages of good uniformity and reduced structural deformation compared to mechanical nanoimprint methods. The features are fabricated to 0.5 μm wide and 0.2 μm high under the ultraviolet curing of 480 mJ/cm2, imprinting cycle time of 30 s and pressure as low as 0.92 kgf/cm2. The imprinting technique possesses the potential for fabrication of submicron magnetic features at room temperature across large area with high production rate and good pattern fidelity.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: CIRP Annals - Volume 59, Issue 1, 2010, Pages 263-266
Journal: CIRP Annals - Volume 59, Issue 1, 2010, Pages 263-266
نویسندگان
H. Hocheng, T.T. Wen,