کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
10673359 | 1010245 | 2015 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Surface forming on glass material by femtosecond laser modification with HF etching process
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موضوعات مرتبط
مهندسی و علوم پایه
سایر رشته های مهندسی
مهندسی صنعتی و تولید
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Surface forming on glass material by femtosecond laser modification with HF etching process Surface forming on glass material by femtosecond laser modification with HF etching process](/preview/png/10673359.png)
چکیده انگلیسی
A rapid surface-microstructuring by femtosecond laser modification without profile scanning is demonstrated on glass. The embedded grating and grid patterns are scribed inside the glass by the laser. After that, the glass is immersed in 10Â wt% HF for developing. Additionally, the numerical calculation and simulation are utilized to compute the modification with etching. A fast approach to calculate the modified volume and shape by considering the fluence and material absorption is proposed. The obtained structure formed by anisotropic etching between modified and intrinsic material can be simulated for different etching selectivity. The simulated results agree well with the experimental ones.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: CIRP Annals - Volume 64, Issue 1, 2015, Pages 205-208
Journal: CIRP Annals - Volume 64, Issue 1, 2015, Pages 205-208
نویسندگان
Hung-Yin Tsai, Shao-Wei Luo, Tien-Li Chang,