کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
10673673 | 1010263 | 2005 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Investigation of Nanoscale Electro Machining (nano-EM) in Dielectric Oil
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
سایر رشته های مهندسی
مهندسی صنعتی و تولید
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Investigation of Nanoscale Electro Machining (nano-EM) in Dielectric Oil Investigation of Nanoscale Electro Machining (nano-EM) in Dielectric Oil](/preview/png/10673673.png)
چکیده انگلیسی
There is a great need to produce nanoscale features on diverse and sometimes difficult-to-machine materials for electronic and bio-medical applications. This paper describes an electro machining (EM) process at nanoscale, implemented using a scanning probe platinum-iridium (Pt-lr) electrode tool (15-20 nm radius) in dielectric oil. The experiments were conducted by maintaining a gap of 2 nm between the tool and the work-piece. These experiments have successfully demonstrated that controlled and consistent machined features, as small as 10 nm in diameter, on atomically flat gold can be obtained. It is suggested that resonant tunnelling through dielectric oil molecules causes the removal of material.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: CIRP Annals - Volume 54, Issue 1, 2005, Pages 175-178
Journal: CIRP Annals - Volume 54, Issue 1, 2005, Pages 175-178
نویسندگان
Ajay P. Malshe, K. Virwani, K.P. Rajurkar, D. Deshpande,