کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
10674644 | 1010322 | 2007 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Development of Silica Polyvinyl Alcohol Wheels for Wet Mirror Grinding of Silicon Wafer
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موضوعات مرتبط
مهندسی و علوم پایه
سایر رشته های مهندسی
مهندسی صنعتی و تولید
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Development of Silica Polyvinyl Alcohol Wheels for Wet Mirror Grinding of Silicon Wafer Development of Silica Polyvinyl Alcohol Wheels for Wet Mirror Grinding of Silicon Wafer](/preview/png/10674644.png)
چکیده انگلیسی
It is strongly desired to develop a cup grinding wheel which enables mirror finishing of a device wafer on the same machine after back grinding. Silica wheels have the capability of mirror finish in a dry condition but there remain serious problems in flatness and thermal damage to a dicing tape. A new silica wheel which can be used in a wet condition has been developed. The PVA (polyvinyl alcohol) was adopted as the bonding agent, by which the absorbent swell resulted in disturbance of water infiltration to the inside in cup grinding. A series of experiments show that mirror finishing will be achieved within 2Â min. This could not be accomplished utilizing phenol wheels.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: CIRP Annals - Volume 56, Issue 1, 2007, Pages 361-364
Journal: CIRP Annals - Volume 56, Issue 1, 2007, Pages 361-364
نویسندگان
Y. Tani, T. Okuyama, S. Murai, Y. Kamimura, H. Sato,