کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
10674730 | 1010428 | 2011 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Rapid and direct micro-machining/patterning of polymer materials by oxygen MeV ion beam irradiation through masks
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
سطوح، پوششها و فیلمها
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Rapid and direct micro-machining/patterning of polymer materials by oxygen MeV ion beam irradiation through masks Rapid and direct micro-machining/patterning of polymer materials by oxygen MeV ion beam irradiation through masks](/preview/png/10674730.png)
چکیده انگلیسی
PTFE (PolyTetraFluoroEthylene), often called Teflon, is a well-known polymer for being a non-stick material with good thermal properties. Moreover, PTFE is biocompatible and especially it is a cyto-compatible polymer. To enable bonding, a chemical etching based on sodium solutions is generally used to modify surfaces. In this paper we study the etching of PTFE using an oxygen ion beam in the MeV energy range. We present micro-patterning of PTFE through masks with two fluences of 5 Ã 1015 and 1 Ã 1016 ion cmâ2. As is demonstrated the use of a mask allows structuring of large areas while maintaining a distance between the mask and sample makes industrial applications possible.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 269, Issue 20, 15 October 2011, Pages 2422-2426
Journal: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms - Volume 269, Issue 20, 15 October 2011, Pages 2422-2426
نویسندگان
S. Brun, G. Guibert, C. Meunier, E. Guibert, H. Keppner, S. Mikhailov,