Topography simulation of sputtering using an algorithm with second order approximation in space

► We present a two-dimensional surface advancement algorithm that uses circular arcs. ► The algorithm allows kinks in the surface for the simulation of shocks. ► The method of characteristics yields the motion and the slope of the surface. ► Analysis of infinitesimally separated characteristics enables shock detection. ► Demonstration of examples with redeposition and with facet formation.