کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
10676171 | 1011272 | 2005 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Pressure/current characteristics of a magnetron cold cathode gauge
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
سطوح، پوششها و فیلمها
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چکیده انگلیسی
The gauge characteristics for a magnetron gauge in the pressure range 10â8-10â5Â mbar with nitrogen as a test gas have been studied. The discharge current versus pressure was measured at different magnetic fields from 0.10 to 0.15Â T and anode voltages from 4.0 to 7.0Â kV. The results showed that a change of slope appeared at pressures between 5Ã10â8 and 5Ã10â7Â mbar. At higher magnetic fields, a change of slope appeared at lower pressures. The slope of the curve below the inflection was higher than that above the inflection. At the lowest magnetic field (0.10Â T), a divergence of the curves was observed at pressures below the inflection. The slope of the curve showed no clear dependence on applied voltage.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Vacuum - Volume 78, Issue 1, 4 April 2005, Pages 13-17
Journal: Vacuum - Volume 78, Issue 1, 4 April 2005, Pages 13-17
نویسندگان
A. Vesel, M. Mozetic, M. Zumer, V. Nemanic, B. Zajec,