کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
10676302 | 1011298 | 2005 | 6 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Formation of Ni2Si silicide in Ni/Si bilayers by ion beam mixing
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
سطوح، پوششها و فیلمها
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چکیده انگلیسی
We have studied ion mixing in Ni-Si(1Â 1Â 1) bilayers using noble gas ions. Thin Ni films of 45Â nm thickness, deposited on a Si (1Â 1Â 1) substrate, were irradiated with 175Â keV Kr and 110Â keV Ar ions at the same fluence of 4Ã1016Â ions/cm2 at room temperature. The formation of the mixing and the elemental depth profile were investigated by Rutherford backscattering spectrometry. In the Ar irradiated sample, there was no structural change. On the other hand, we have noted the formation of Ni2Si for the sample irradiated with Kr ions. X-ray diffraction measurements confirmed the formation of the Ni2Si phase. The surface morphology of the Kr irradiated sample was also studied by scanning electron microscopy.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Vacuum - Volume 77, Issue 2, 17 January 2005, Pages 125-130
Journal: Vacuum - Volume 77, Issue 2, 17 January 2005, Pages 125-130
نویسندگان
N. Boussaa, A. Guittoum, S. Tobbeche,