کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
10676304 1011298 2005 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Synthesis and characterization of large area well-aligned carbon nanotubes by ECR-CVD without substrate bias
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سطوح، پوشش‌ها و فیلم‌ها
پیش نمایش صفحه اول مقاله
Synthesis and characterization of large area well-aligned carbon nanotubes by ECR-CVD without substrate bias
چکیده انگلیسی
Large area, well-aligned carbon nanotubes (CNTs) were synthesized on porous silicon by electron cyclotron resonance chemical vapor deposition (ECR-CVD). No bias was applied on the substrate in this experiment. CH4 and H2 were used as source gases and Fe3O4 nanoparticles as the catalyst. Scanning electron microscopy (SEM), transmission electron microscopy (TEM), X-ray diffraction spectroscopy (XRD), and Raman spectrum were used to evaluate the structure and composition. The results show that these CNTs have varying outer diameters from 10 to 90 nm and uniform length over 10 μm. They display hollow tubular and chain structures. The possible formation mechanism of aligned CNTs is discussed.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Vacuum - Volume 77, Issue 2, 17 January 2005, Pages 139-144
نویسندگان
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