کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
10676479 | 1011335 | 2005 | 6 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Comparison of back-foil SXRF and EPMA for the elemental characterization of thin coatings
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
سطوح، پوششها و فیلمها
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چکیده انگلیسی
Back-foil scanning X-ray microfluorescence (SXRF), developed in a scanning electron microscope and applied for the analysis of very thin coatings is compared with electron probe X-ray microanalysis (EPMA). Both experimental results and Monte-Carlo calculations are used in this respect. The signal to background ratio as a function of the primary electron beam energy and angle of incidence, and for different film thicknesses is obtained for both techniques and a comparative study of sensitivity is made. Back-foil SXRF used in optimized experimental conditions, is found to be more sensitive than EPMA, especially in the case of very thin overlayers. The resolving power of back-foil SXRF is also calculated for the anode used by Monte-Carlo simulations.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Vacuum - Volume 77, Issue 4, 11 March 2005, Pages 371-376
Journal: Vacuum - Volume 77, Issue 4, 11 March 2005, Pages 371-376
نویسندگان
E.S. Valamontes, J.C. Statharas,