کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
10676492 1011335 2005 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Signal formation analysis of the electron beam current distribution measurements
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سطوح، پوشش‌ها و فیلم‌ها
پیش نمایش صفحه اول مقاله
Signal formation analysis of the electron beam current distribution measurements
چکیده انگلیسی
The Fourier spectra of signals and the modulation transfer functions are chosen as main characteristics of the electron beam (EB) analyzers. This approach can be used for EB analyzer design and optimization. It is concluded that the space-frequency characteristics of the scanning (modulation) system are the limiting factors for the signal distortion. A matrix of more than 32×32 sufficiently short impulses and at a transfer rate twice higher than the maximum spectrum frequency can create an adequate image of the beam current radial or angular distribution. At the data processing of the rotating probe or of the moving slit measurements an inverse transformation is needed and a false minimum can appear in the calculated current distributions.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Vacuum - Volume 77, Issue 4, 11 March 2005, Pages 457-462
نویسندگان
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