Lamellar multilayer amplitude grating as soft-X-ray Bragg monochromator

The design of efficient lamellar multilayer amplitude grating (LMAG) monochromators in terms of bandwidth and peak reflectivity for the soft-X-ray domain, covering the K emission of low atomic-number elements: B to Si, is considered. A Mo/B4C LMAG suited for spectrometry in this spectral domain has been designed, fabricated using electron beam lithography together with reactive ion etching and tested with success.