کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1268354 972401 2009 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Time dependent breakdown characteristics of parylene dielectric in metal–insulator–metal capacitors
موضوعات مرتبط
مهندسی و علوم پایه شیمی شیمی (عمومی)
پیش نمایش صفحه اول مقاله
Time dependent breakdown characteristics of parylene dielectric in metal–insulator–metal capacitors
چکیده انگلیسی

In this work, we present reliability results of MIM (Metal–Insulator–Metal) capacitors fabricated with parylene as the dielectric, deposited at room temperature. We have evaluated the time dependent dielectric breakdown (TDDB) of parylene-based MIM capacitors as a function of constant DC voltage stress, area and dielectric thickness of the capacitor. Mean-time-to-failure (MTTF) of parylene evaluated at different stress voltages shows a power law distribution over the applied voltage range and device area, with MTTF driven by the number of defects. Defect density in the parylene capacitors is also reported and is calculated to be ∼1.2 × 103 defects/cm2.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Organic Electronics - Volume 10, Issue 5, August 2009, Pages 1024–1027
نویسندگان
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