Cyclopentasilane Si5H10: First single crystal X-ray structure of an oligosilane SixHy and thermal analysis with TG/MS

• Single crystals of highly reactive cyclopentasilane were grown in situ at − 100 °C.
• We report the first successful crystal structure analysis of an oligosilane.
• Short intermolecular distances below the sum of v.d.Waals radii are found.
• Thermolysis evolves H2, SiH4 and Si2H6 yielding a-Si:H at ~ 250 °C.

Cyclopentasilane Si5H10 (CPS) – a liquid silicon precursor – was crystallized in situ at − 100 °C which allowed determination of the single crystal X-ray structure, showing short intermolecular distances below the sum of the v.d.Waals radii of the corresponding atoms. Further characterization included a thermal analysis with mass spectrometry (TG/MS) of the segregated species hydrogen, mono- and disilane.

Cyclopentasilane Si5H10 (CPS) – a liquid precursor for low temperature deposition of silicon films – was crystallized in situ at − 100 °C which allowed the determination of the first single crystal X-ray structure of an oligosilane. Further characterization included a thermal analysis with a mass spectroscopic analysis of the segregated fragments.Figure optionsDownload as PowerPoint slide