Nd:YAG laser drilling in epoxy resin/AlN composites material

The Nd:YAG laser drilling performance of blind vias in epoxy/aluminium nitride (AlN) composite and virgin epoxy is systemically studied through varying the average laser power, the repetition times, and the pulse repetition rate from 0.2 W to 1.2 W, 12 to 48 and 3 KHz to 20 KHz, respectively. The results show that compared with pure epoxy, the drilling conditions of blind vias in epoxy/AlN composite can be changed in a wide range, with no residue found significantly at the surface of the entrance of the blind vias. The influence of the repetition rate is more evident among the parameters of the Nd:YAG laser, such as the average laser power, laser repetition rate, and repetition times, and should be carefully controlled.