کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1473438 | 991042 | 2013 | 5 صفحه PDF | دانلود رایگان |
![عکس صفحه اول مقاله: Microstructure and dielectric response of (1 1 1)-oriented tetragonal BaTiO3 thick films prepared by laser chemical vapor deposition Microstructure and dielectric response of (1 1 1)-oriented tetragonal BaTiO3 thick films prepared by laser chemical vapor deposition](/preview/png/1473438.png)
• (1 1 1)-oriented BaTiO3 films were prepared on Pt-coated Si substrate by laser CVD.
• BaTiO3 film had a significant (1 1 1) orientation, close to the ideal orientation.
• The ɛ′ of 2600 at TC = 395 K was the highest value in the literature for CVD-BaTiO3.
(1 1 1)-oriented barium titanate (BaTiO3) thick films were prepared on Pt-coated Si substrates by laser chemical vapor deposition. The effects of deposition temperature on the orientation, microstructure, and dielectric response of the BaTiO3 films were investigated. BaTiO3 films exhibited a significant (1 1 1) orientation at deposition temperatures from 930 to 1010 K. With increasing deposition temperature from 875 to 1010 K, the surface microstructure changed from cauliflower-like to columnar structures with pyramidal caps. The permittivity of a (1 1 1)-oriented tetragonal BaTiO3 film prepared at 980 K was 1890 at room temperature and 2600 at the Curie temperature of the film (395 K).
Journal: Journal of Asian Ceramic Societies - Volume 1, Issue 2, June 2013, Pages 197–201