Study of chemical interaction at Al-ZERODUR interface

Effect of thermal annealing on bulk and interface properties of ZERODUR glass ceramics was investigated by Raman and X-ray spectroscopy as well as secondary ion mass spectrometry. For this purpose thin aluminium films were deposited onto the surface of ZERODUR samples prepared by mechanical polishing. Internal stresses in the bulk of investigated samples were revealed using modulation-polarization technique. The ability of chemical reactions in Al-ZERODUR system is briefly analyzed to explain experimental data. Contribution of amorphous and crystalline phases of ZERODUR to observed phenomena is discussed.