Surface modification of ion-exchanged float aluminosilicate glass during deposition of amorphous alumina coatings by e-beam evaporation

• The temperature and particle impact is considered as a driver for ions migration.
• Al2O3 films deposited on the ion-exchanged glasses relax its surface compression.
• Structural modification of ion-exchanged glasses is induced by depositing thin films.

The main objective of this study was to investigate the physico-chemical and mechanical properties of ion-exchanged float aluminosilicate glasses deposited the Al2O3 films. The concentration gradients of potassium (K), sodium (Na), aluminum (Al) and oxygen (O) elements near Al2O3 film/ion-exchanged glass interface were analyzed by electron probe X-ray micro-analyser (EPMA). Compared with the ion-exchanged glasses, the peak of potassium concentration profile in the ion-exchanged glasses deposited Al2O3 films decreases and moves from glass surface to the inner part. Potassium ion diffusion is accompanied by aluminum (Al) and oxygen (O) diffusion from Al2O3 film into the ion-exchanged glass during deposition. In-depth analyses are performed using micro-Raman spectroscopy on sample cross sections in the aim to investigate the microstructure variation of the ion-exchanged glasses after deposited Al2O3 film on it. The results show that the change of chemical composition throughout ion-exchanged glass surface region can cause a gradual change in microstructure and physical properties.