Channel waveguides based on thermally co-evaporated Te–Ge–Se films for infrared integrated optics

The feasibility of telluride based single-mode waveguides being able to guide light in the infrared region [1–16 μm] is demonstrated. The rib waveguides comprise a silicon substrate, two Te–Ge–Se films deposited by thermal co-evaporation. The first one plays the role of a cladding layer while the second is the core layer. In order to control the light confinement, the second layer is further etched by reactive ion etching in CHF3/O2/Ar atmosphere. The obtained structures behaved as channel waveguides with a single-mode transmission demonstrated at 1.55 μm. Transmission optical losses were evaluated by the cut-back method on the very first prototypes and were comprised between 0.6 and 1.8 dB cm− 1.

► The fabrication of single-mode channel waveguides based on TeGeSe films
► The TeGeSe films were deposited by thermal co-evaporation.
► The waveguides were made of a core and a cladding layer deposited onto silicon.
► The core layer was etched by reactive ion etching.
► The waveguides were characterized by propagation losses of 1.2 ± 0.6 dB cm− 1.