کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1481476 1510474 2013 9 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Experimental testing and FEM simulation for thermal imprinting of micro/nano glass-optical devices
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سرامیک و کامپوزیت
پیش نمایش صفحه اول مقاله
Experimental testing and FEM simulation for thermal imprinting of micro/nano glass-optical devices
چکیده انگلیسی

Thermal imprinting of glass-optical devices and its numerical simulation using the finite element method were investigated. The constitutive equation of the glass material was estimated using compression creep tests based on conventional thermoviscoelastic theory. The relaxation modulus of D263 glass was approximated by the generalized Maxwell model. For glass thermal imprinting, a glassy carbon die was used on which line and space or microlens array patterns were machined with a focused ion beam (FIB). The optimum molding-temperature condition that gives precise transcription profile was investigated in detail. Finite element analyses were performed to simulate the experimental glass thermal imprinting. In comparing experimental and numerical results, the transcription heights of groove or microlens obtained by experimental tests approximately agreed with numerical values. Finite element analyses using thermoviscoelastic property of glass are reliable in estimating suitable conditions for glass thermal imprinting.


► Thermal imprint tests and FEM simulations of glass-optical devices were investigated.
► The internal and residual stresses of glass were caused by imprinting pressure.
► Quarter of three-dimensional numerical model in consideration with periodicity was used.
► The influence of frictional coefficient on molding formability was dependent on object shape.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Non-Crystalline Solids - Volume 362, 15 February 2013, Pages 246–254
نویسندگان
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