Absorption and luminescence in amorphous SixGe1-xO2 films fabricated by SPCVD

► Ge-doped silica (SPCVD) deposited films do not expose ODC under excitation 5 eV photons. ► Fusion of films reveals the absorption and luminescence bands of permanent ODCs. ► 6.4 eV excimer laser yields transient ODCs revealed from a latent state.