کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1483071 1510527 2008 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Three-dimensional high-aspect-ratio recording in resist
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سرامیک و کامپوزیت
پیش نمایش صفحه اول مقاله
Three-dimensional high-aspect-ratio recording in resist
چکیده انگلیسی

We demonstrate a method of capillary force reduction during wet processing of three-dimensional structures photo-polymerized in resist by femtosecond pulses. A rinse in water was added as the final step of wet processing for recovery of free-standing photo-polymerized structures with feature sizes of ∼100 nm. The hydrophobicity of resist was utilized for reduction of the capillary drainage force. We show a possibility of holographical recording of a three-dimensional woodpile structure, which has a good permeability and can be fabricated by the proposed modified wet processing.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Non-Crystalline Solids - Volume 354, Issues 12–13, 15 February 2008, Pages 1194–1197
نویسندگان
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