کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1484698 1510525 2008 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Polycrystalline silicon with large disk-shaped grains by Ni-mediated crystallization of doped amorphous silicon
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سرامیک و کامپوزیت
پیش نمایش صفحه اول مقاله
Polycrystalline silicon with large disk-shaped grains by Ni-mediated crystallization of doped amorphous silicon
چکیده انگلیسی
Silicide mediated crystallization (SMC) of p-doped amorphous silicon (a-Si) has been studied. There are the different grain-shapes of crystallization of doped and non-doped a-Si. Non-doped a-Si is crystallized with needle-shaped grains, while it is observed the disk-shaped grains are formed in crystallized doped a-Si. The crystallization of slightly doped a-Si exhibits larger grain size compared with non-doped and heavily doped films. The p-dopant in a-Si suppresses the formation of the NiSi2 precipitate which act as a crystallization nucleus, causing continuous grain growth and the formation of disk-shaped grains.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Non-Crystalline Solids - Volume 354, Issues 19–25, 1 May 2008, Pages 2341-2344
نویسندگان
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