کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1484877 1510528 2008 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Differential etching of chalcogenides for infrared photonic waveguide structures
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سرامیک و کامپوزیت
پیش نمایش صفحه اول مقاله
Differential etching of chalcogenides for infrared photonic waveguide structures
چکیده انگلیسی

Chemical etching rates for two different chalcogenide glass compositions, As40S60 and As24S38Se38, were studied using sodium hydroxide based etchant solutions. Etching was performed using a variation of standard photolithographic masking and wet-etching techniques. Variations in etch rate with NaOH concentration and glass composition were observed. The depth of etch was characterized using an optical profilometer. Etch rate differences as large as three orders of magnitude between these two glasses were observed at low NaOH concentration (0.053 M). We present a single variable etch rate curve of etch depth per time (nm/s) versus NaOH overall solution concentration (in M) for these two different chalcogenide glasses. This technology shows promise for fabricating photonic structures and has potential applications in fabricating novel photonic bandgap structures that will function in the long-wave infrared (LWIR) regime.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Non-Crystalline Solids - Volume 354, Issues 10–11, 1 February 2008, Pages 813–816
نویسندگان
, , , ,