کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1486635 1510561 2005 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Fabrication of inorganic–organic hybrid films for optical waveguide
کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سرامیک و کامپوزیت
پیش نمایش صفحه اول مقاله
Fabrication of inorganic–organic hybrid films for optical waveguide
چکیده انگلیسی

Inorganic–organic hybrid guiding and buffer layers for optical waveguides were synthesized by the sol–gel process. An acid-catalyzed solution of 3-(trimethoxysilyl)propylmethacrylate and tetraethylorthosilicate was used as a precursor to produce thick films by spin-coating. Incorporation of a UV-sensitive functional group leads to the fabrication of the photo-patternable guiding layer. High-resolution patterned films with 8 μm linewidth were obtained using a conventional photo-lithography. Furthermore, the amount of phenyltrimethoxysilane added as a refractive index modifier varied in order to control the refractive index of the underlying buffer layer. The refractive index variations and structural changes of these inorganic–organic hybrid films as a function of the processing conditions were analyzed using the prism coupling technique and a Fourier transform infrared spectrometer. We have produced optically transparent films at above 500 nm with a propagation loss of 0.84 and 1.49 dB/cm at 1310 and 1550 nm, respectively.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Non-Crystalline Solids - Volume 351, Issues 43–45, 1 November 2005, Pages 3530–3535
نویسندگان
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