A novel reflector of AZO thin films applicable for terahertz devices

Despite the wide application of transparent conducting oxides in visible range, their properties and application in the terahertz range have not yet been extensively investigated. In this paper, we present a special AZO thin film – made reflector, which possesses both high reflectance in broad terahertz frequency band and high transmittance in visible range. The experimental data of the AZO films was in a good agreement to that of transfer matrix calculations. Meanwhile, the terahertz reflector of the AZO films used as reference was well verified in terahertz reflection measurement. The terahertz reflector of the AZO films is very suitable for the multispectral terahertz systems.

► We present a special AZO thin film – made reflector in terahertz range.
► The reflector has both high reflectance in terahertz range and high transmittance in visible range.
► The reflector is very useful for the multispectral terahertz systems.
► The reflector is very attractive due to its low cost, long-term stability and nontoxicity for large-scale application.