کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1495300 | 992932 | 2011 | 7 صفحه PDF | دانلود رایگان |
We present extended experimental material about optical and mechanical properties as well as the water content of aluminium oxide films, deposited by plasma ion assisted electron beam evaporation. A clear correlation between these experimental data is established and understood as being affected by the different degree of the porosity of the films. When adding fluorine as a reactive gas during deposition, aluminium oxifluoride layers can be obtained that appear nearly free of water, and combine UV-transparency with higher UV refractive indices than porous aluminium oxide layers.
Plasma ion assisted deposition of alumina coatings under optimized conditions results in superior UV optical coating properties. A further increase in the UV transparency can be achieved when adding fluorine as reactive gas during deposition.Figure optionsDownload high-quality image (81 K)Download as PowerPoint slideHighlights
► Alumina and aluminium oxifluoride layers can be prepared by PIAD techniques.
► Thermoprobe measurements quantify the energy impact on the substrate.
► Layer properties can be tuned by the reactive gas flow during deposition.
► Aluminium oxifluoride layers show a better UV transparency than alumina layers.
Journal: Optical Materials - Volume 33, Issue 11, September 2011, Pages 1681–1687