Photoluminescence from Er-doped Si-in-SiNx thin films

Photoluminescence from Er3+-implanted Si-in-SiNx films emitting efficiently visible light were investigated. A Stark structure in the Er3+ photoluminescence spectrum was observed at room temperature, which reveals more than one site symmetry for the Er3+-centers in the Si-in-SiNx matrix. The correlation between the visible photoluminescence from the silicon nanoparticles and the 1.54 μm emission from the Er3+-centers was discussed.