Polarization-insensitive PECVD SiC waveguides for sensor platform

Planar silicon carbide (SiC) waveguides are proposed for fabrication on a silicon substrate with a oxide isolation layer. Using post deposition annealing it is possible to achieve zero Polarization-Dependent Loss (PDL) within optical SiC waveguides fabricated using a low temperature deposition technique. The PDL mechanism is discussed and explained. Further, the optical propagation losses are improved leading to losses as low as 2 dB/cm.