کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1497463 993012 2007 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Optical excitation of surface phonon polaritons in silicon carbide by a hole array fabricated by a focused ion beam
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سرامیک و کامپوزیت
پیش نمایش صفحه اول مقاله
Optical excitation of surface phonon polaritons in silicon carbide by a hole array fabricated by a focused ion beam
چکیده انگلیسی

Silicon carbide (SiC) is a polar material with a lattice resonance in the thermal infrared causing a wavelength interval with a negative dielectric function. Within this interval SiC can support surface waves. To excite surface waves, i.e., surface phonon polaritons (SPP), the sample has to be structured with a periodic micro-pattern. The possibilities of using a focused ion beam (FIB) for microfabrication of periodic microstructures in silicon carbide (SiC) is investigated. We present optimized parameters for the microfabrication of SiC with a FIB, as well as calculated and experimental optical results confirming the sensitive optical properties of the material required for the surface excitation are not destroyed by the preparation process.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Optical Materials - Volume 30, Issue 2, October 2007, Pages 328–333
نویسندگان
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