Structural characterization of CVD diamond films using Raman and ESR spectroscopy methods

Defects in diamond thin films synthesized by the Hot Filament Chemical Vapor Deposition (HF CVD) method were investigated by Electron Spin Resonance (ESR) and Raman spectroscopy. A series of diamond films of different quality have been synthesized from a mixture of hydrogen and acetylene at different total gas pressure in the range of 20–120 mbar. It was observed that the film morphology changed with increasing deposition pressures from the so-called “ball-like” structure via (1 1 1) and (1 0 0) type texture to the morphology having a mixed character. A comparative study on the ESR and Raman spectra of these films is performed.