The influence of tungsten on the thermal stability and mechanical behavior of electrodeposited nickel MEMS structures

The thermal stability and mechanical behavior of LIGA Ni–W alloys with 5 and 15 at.% W were investigated. The strength of these alloys exceeds that of pure LIGA Ni, and the underlying microstructures of the Ni–W alloys are stable to 700 °C. The Ni–W alloys are brittle as-deposited, but annealed samples exhibited a promising balance of strength and ductility. W-alloyed LIGA Ni offers increased thermal stability and strength, as well as opportunities for tailoring mechanical properties with heat treatment.