کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1500726 993357 2010 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Homogeneous Al2O3 multilayer structures with reinforced mechanical stability for high-performance and high-throughput thin-film encapsulation
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سرامیک و کامپوزیت
پیش نمایش صفحه اول مقاله
Homogeneous Al2O3 multilayer structures with reinforced mechanical stability for high-performance and high-throughput thin-film encapsulation
چکیده انگلیسی

Homogeneous multilayered barrier films were fabricated by means of reactive and nonreactive sputtering of Al2O3. Homogeneous multilayer structures were seen to possess superior mechanical stability than single-layered films. The multilayer films presented 50% improved barrier performance and the fabrication process was 40% faster compared with single Al2O3 layers of the same thickness. The water vapor transmission rate was enhanced up to the order of 10−4 g m−2 day−1 from a three-pair system of reactive and nonreactive sputtered Al2O3 bilayers.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Scripta Materialia - Volume 62, Issue 7, April 2010, Pages 447–450
نویسندگان
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