کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
1500726 | 993357 | 2010 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Homogeneous Al2O3 multilayer structures with reinforced mechanical stability for high-performance and high-throughput thin-film encapsulation
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی مواد
سرامیک و کامپوزیت
پیش نمایش صفحه اول مقاله

چکیده انگلیسی
Homogeneous multilayered barrier films were fabricated by means of reactive and nonreactive sputtering of Al2O3. Homogeneous multilayer structures were seen to possess superior mechanical stability than single-layered films. The multilayer films presented 50% improved barrier performance and the fabrication process was 40% faster compared with single Al2O3 layers of the same thickness. The water vapor transmission rate was enhanced up to the order of 10−4 g m−2 day−1 from a three-pair system of reactive and nonreactive sputtered Al2O3 bilayers.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Scripta Materialia - Volume 62, Issue 7, April 2010, Pages 447–450
Journal: Scripta Materialia - Volume 62, Issue 7, April 2010, Pages 447–450
نویسندگان
Yun-Hyuk Choi, Young Gu Lee, Xavier Bulliard, Kwang-Hee Lee, Sangyoon Lee, Dukhyun Choi, Jong-Jin Park, Jong Min Kim,