کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
1500895 993363 2010 4 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Anisotropy effects on the reliability of single-crystal silicon
موضوعات مرتبط
مهندسی و علوم پایه مهندسی مواد سرامیک و کامپوزیت
پیش نمایش صفحه اول مقاله
Anisotropy effects on the reliability of single-crystal silicon
چکیده انگلیسی

Anisotropy effects on the reliability of single-crystal silicon were investigated by means of scratch tests along [1 1 0] and [1 0 0] crystallographic directions. It was found that fracture (partial cone cracks) starts along favoured {1 1 0} and {1 1 1} cleavage planes, with crack orientation varying upon the scratching direction. Moreover, the [1 0 0] direction was found to be twice as reliable as the [1 1 0] direction. Stress and phase analyses were carried out to explain this effect, which has implications for the design of silicon-based devices.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Scripta Materialia - Volume 63, Issue 10, November 2010, Pages 997–1000
نویسندگان
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