Three-dimensional atom probe investigations of Ti–Al–N thin films

Elemental processes underlying the temperature-initiated decomposition of low-conductive Ti–Al–N thin films is investigated on an atomic-scale by laser-assisted three-dimensional atom probe tomography. This allows three-dimensional observation of spinodal decomposition in Ti–Al–N. Experimental evidence is presented for the formation of an interconnected network of Ti- and Al-rich domains and the subsequent phase transformation under increased thermal load to a dual phase structure of TiN and AlN areas.