Improving the spatial resolution of a magnetic force microscope tip via focused ion beam modification and magnetic film coating

To fabricate high-resolution magnetic tips by a more convenient method, this study applied focused ion beam milling and magnetic film coating techniques to manufacture high aspect ratio (HAR) magnetic force microscope (MFM) tips. The results showed that a HAR MFM tip with a ratio of 10:1 was successfully fabricated. MFM measurements demonstrated that this probe provided clear high-resolution MFM images. The ultimate lateral resolution of the HAR MFM tip was reduced to a minimum of 20 nm.