Structures and nanoindentation properties of nanocrystalline and amorphous Ta–W thin films

The microstructures and mechanical properties of Ta–W thin films sputter-deposited at two substrate temperatures, 298 and 773 K, were investigated. Whereas the 298 K sample was crystalline, the 773 K sample had an amorphous structure. Hardness and Young’s modulus of the nanocrystalline Ta–W thin film were determined to be 14.29 and 181.73 GPa, respectively. These values are ∼20 and 10% lower than those measured from the amorphous counterpart.