Three-dimensional atom probe investigation of Fe/Dy multilayers

Thermally evaporated (Fe 3 nm/Dy 2 nm) multilayers have been magnetically and chemically investigated. Three-dimensional atom probe (3DAP) images related to multilayers revealed diffuse interfaces as well as the presence of Fe in Dy layers. Magnetic hysteresis loops measured on planar layers deposited on flat Si substrates show that the perpendicular magnetic anisotropy is much higher for the multilayers deposited at 600 K as compared to 320 K. 3DAP elemental maps show concurrently that the layered structure is degraded at 600 K. 3DAP analysis concerning an Fe/Dy multilayer deposited at 320 K on flat-topped Si posts is presented, and shows asymmetric interfaces.